Founded in March 2000 as a wholly owned subsidiary of Olympus Corporation, Tokyo, Japan, Olympus Integrated Technologies America, Inc. specializes in semiconductor products and systems for wafer inspection and defect review. We are the application software development R&D center for Olympus semiconductor products. Our location in San Jose, California, enables us to respond quickly to provide sales, service, and support to semiconductor companies throughout the United States.

We provide a range of optical inspection and defect review stations from simple stand-alone inspection to advanced automated defect review - factory ready with full GEM300 compliance. A variety of visible light observation modes are available along with Olympus' patented CaF2 air-gap DUV optics to provide superior resolution to 80 nanometers.