San Jose CA - March 20, 2001 -- Olympus Corporation, Japan has received an order for multiple systems of its AL3100 Optical Defect and Wafer Inspection System from a large Japanese semiconductor device manufacturer. The 300mm wafer inspection systems will be installed over the next two months. The systems utilize Olympus' patented 248 nm broadband deep ultraviolet optics. These DUV optics extend the capability of optical microscopy for inspection and review of defect sizes as small as 0.13 micron. The AL3100 is being provided with both FOUP and open cassette configurations and advanced photographic equipment. A spokesperson for Olympus indicated the company was awarded the order because of its strong customer relations and superior technical support.

Olympus Integrated Technologies America, (Olympus ITA) of San Jose, the newly formed U.S. based subsidiary of Olympus Japan will be working closely with local semiconductor device manufacturers on the development of advanced automatic defect classification (ADC) and review software for the AL3100. The AL3100 can be used for 200mm and 300mm wafer inspection. Olympus ITA plans to demonstrate the capabilities of the AL3100 during Semicon West 2001 at the Moscone Center, July 16-18th.

According to the most recent VLSI Research report, Olympus holds over a 30% worldwide marketshare of general purpose optical review stations. This represents a second place position behind the leader KLA-Tencor. Olympus also holds the second largest market position in confocal scanning laser microscopes (26.9%) and confocal scanning optical microscopes (28%). With the recent shipment of multiple AL3100 systems, Olympus is gaining marketshare in the highly competitive wafer inspection business.

About Olympus-Integrated Technologies America
Olympus Integrated Technologies America, Inc. of San Jose provides product and direct sales/service support for Olympus optical inspection and defect review products and OEM Optics in the U.S. market. Olympus-ITA is an emerging semiconductor equipment supplier with the backing of Olympus Corporation, Japan, an eighty- year old, $4 billion dollar organization.